Study on the characteristics of ZnO films fabricated by AP-MOCVD
博士 === 中原大學 === 電子工程研究所 === 98 === This thesis, focuses on the characterizations of undoped, n- and p- type zinc oxide (ZnO) semiconductors fabricated by atmospheric pressure metal organic chemical vapor deposition (AP-MOCVD). During the AP-MOCVD process, diethylzinc (DEZn) and water were used as th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64203145048136347332 |