The study of sputtering parameters on the tribological properties of DLC films
碩士 === 建國科技大學 === 自動化工程系暨機電光系統研究所 === 98 === The main purpose of this study is to research the tribological properties and cutting performance of a-C:H(DLC) coatings deposited from graphite and zirconium targets by unbalanced magnetron sputtering system. It contains three stages in the study. It foc...
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| Format: | Others |
| Language: | zh-TW |
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2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92385018860695923553 |