| Summary: | 碩士 === 建國科技大學 === 自動化工程系暨機電光系統研究所 === 98 === The main purpose of this study is to research the tribological properties and cutting performance of a-C:H coatings prepared by sputtering graphite and Zirconium targets with unbalanced magnetron sputtering system.
It contains three stages in the study. It focus the influence of DC power frequency on the properties of coatings in first stage. It change the bias voltage of substrate to get various substrate bias voltage of coatings in second stage. It change the C2H2 current capacity to get various C2H2 of coatings in third stage.This study investigates the drilling performance of micro-drilling used different DLC coatings. Experimental result show that the lowest drill flank wear and comer the lowest nail head the lowest roughness of drilled hole the maximum hole diameter. With above-mentioned experiments and results of analysis. Is it cover DLC membrane get into drill and uncoated micro-drills diameter person who wear and tear, nail heading size, hole wall roughness a little each other a little to have to find. frequency of 70 kHz the bias of 42 V the C2H2 of 5 sccm Improvement which plates layer is most,improve and hole and count it to more than 6000 holes, the ones that can make and bore and pare using for PCB capillary are plated layer bestly.
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