Mixed-Product Run-by-Run Process Control ：Combining Time Series and Extended Kalman Filter
碩士 === 中華大學 === 機械工程學系碩士班 === 98 === This thesis developed a technique for controlling MIMO (multi-input multi-output) mix-product semiconductor processes. The conventional run-to-run process control for single-tool and single-type-product processes was improved to that for mix-tool and mix-product...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78963984534511287841 |