Interaction of Halogen Dimer on the Si(001) surface : A First Principle study
碩士 === 國立中正大學 === 物理所 === 98 === The etching of silicon by halogens is important in semiconductor device fabrication . Molecular halogens dissociate and adsorb on the Si(001) surface . The interactions of halogens with Si(001) have been extensively studied . IN this thesis ,we will present a systema...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55012098118337244569 |