The risk assessment & abnormal event analysis of facility gas & chemical supply system in wafer process
碩士 === 元智大學 === 化學工程與材料科學學系 === 97 === The central (gas/chemical) supply systems of wafer factory were studied by analysis abnormal events. This paper refers to this wafer factory characteristic using the FMEA method to set up the boundary condition of risk assessment. This research emphasizes on ex...
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55559538083136222260 |
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ndltd-TW-097YZU051590212016-05-04T04:17:09Z http://ndltd.ncl.edu.tw/handle/55559538083136222260 The risk assessment & abnormal event analysis of facility gas & chemical supply system in wafer process 晶圓廠氣化供應系統風險評估與異常事故分析研究 Ting-Jui Chang 張庭瑞 碩士 元智大學 化學工程與材料科學學系 97 The central (gas/chemical) supply systems of wafer factory were studied by analysis abnormal events. This paper refers to this wafer factory characteristic using the FMEA method to set up the boundary condition of risk assessment. This research emphasizes on exploring and analyzing the frequency and causes by used FMEA risk assessment of the abnormal events. Follow the final conclusion of the study will can to prevent and improve for reduction of abnormal rate and reference of troubleshooting. Jenn-Chiu Hwang 黃振球 2008 學位論文 ; thesis 101 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
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碩士 === 元智大學 === 化學工程與材料科學學系 === 97 === The central (gas/chemical) supply systems of wafer factory were studied by analysis abnormal events. This paper refers to this wafer factory characteristic using the FMEA method to set up the boundary condition of risk assessment. This research emphasizes on exploring and analyzing the frequency and causes by used FMEA risk assessment of the abnormal events. Follow the final conclusion of the study will can to prevent and improve for reduction of abnormal rate and reference of troubleshooting.
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| author2 |
Jenn-Chiu Hwang |
| author_facet |
Jenn-Chiu Hwang Ting-Jui Chang 張庭瑞 |
| author |
Ting-Jui Chang 張庭瑞 |
| spellingShingle |
Ting-Jui Chang 張庭瑞 The risk assessment & abnormal event analysis of facility gas & chemical supply system in wafer process |
| author_sort |
Ting-Jui Chang |
| title |
The risk assessment & abnormal event analysis of facility gas & chemical supply system in wafer process |
| title_short |
The risk assessment & abnormal event analysis of facility gas & chemical supply system in wafer process |
| title_full |
The risk assessment & abnormal event analysis of facility gas & chemical supply system in wafer process |
| title_fullStr |
The risk assessment & abnormal event analysis of facility gas & chemical supply system in wafer process |
| title_full_unstemmed |
The risk assessment & abnormal event analysis of facility gas & chemical supply system in wafer process |
| title_sort |
risk assessment & abnormal event analysis of facility gas & chemical supply system in wafer process |
| publishDate |
2008 |
| url |
http://ndltd.ncl.edu.tw/handle/55559538083136222260 |
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