| Summary: | 碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 97 === This study is to use photolithography process to produce micro pump structure, to use PDMS to package peristaltic pump, and to use piezoelectric buzz as actuator. Simple theoretical analysis and CFD analysis are performed and compared with experimental measurement. In addition, the working phase, the number of chamber, the width of flow channel, the length of flow channel, and diffuser angle are investigated to explore their effects on the volume flow rate. The results indicate that in a two-chamber peristaltic micropump, the three phase -1 has higher volume flow rate than the three-phase -2. For three-chamber micropump, the volume flow rate of the four-phase case is the highest, that of the six-phase case is the second, and that of the three-phase case is the least. The results also reveal that the number of chamber has no clear effect on the volume flow rate of the peristaltic micropump. The volume flow rate is increased as the increasing of the width of the flow channel, while the variation of the length of the flow channel could not affect the volume flow rate. Finally, increasing the diffuser angle could result in higher volume flow rate, and it is recommended in the peristaltic micropump.
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