| Summary: | 碩士 === 大同大學 === 機械工程學系(所) === 97 === In the last decade, there are increasing investigations on lateral field
excited (LFE) acoustic wave sensors in biochemical sensing applications due
to their high sensitivity and simple fabrication. However, the research on this
kind of sensor for gas detection is still awaited. Therefore, we adopted finite
element method to analyze a LFE acoustic wave gas sensor, and further
calculate its sensitivity to the variations of mass density and electrical
conductivity of a selective film caused from gas concentration.
In the meantime, quartz crystal microbalance (QCM) was also analyzed
for comparison. Results show that the LFE sensor exhibits larger sensing
range and higher sensitivity than the QCM. This is because no shielding
electrode exists on sensing surface of the LFE sensor and hence the electric
field can penetrate into the selective film. According to the simulation results,we conclude that a LFE acoustic wave sensor is very suitable to apply forgas detection.
|
|---|
