Mechanical Properties of Aluminum-doped Zinc Oxide Transparent Conducting Films

• Main Authors: Chia-hao Yang, 楊家豪
• Other Authors: Yung-Yu Chen
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/51126990025967626671

碩士 === 大同大學 === 機械工程學系(所) === 97 === Flexible displays will play an important role in future electronic products ranging from cell phones and PDAs to computers, toys, and electronic books due to their attractive properties including reductions in weight and thickness, improved ruggedness, and flexible form. To bear repeated tensions, bends, and folds, it is important to investigate the mechanical properties of components in flexible displays. This paper aims to measure the mechanical properties of aluminum-doped zinc oxide (AZO) transparent conductive thin film. The AZO films were deposited on the glass substrate by sol-gel method and further determine a better thermal treatment temperature in sol-gel process. In addition, AZOY films were also deposited on the glass and polyethylene terephthalate (PET) substrate at room temperature by RF magnetron sputter. Their optical, electrical, structural, and mechanical properties were measured to determine an optimal sputtering power. The results of the sol-gel method show that AZO films prepared at the thermal treatment temperature of 650℃ exhibited a smaller surface roughness and better crystallization; Moreover, its Young's modulus and hardness, 83 GPa and 4.1 GPa respectively, are much higher than the other two thermal treatment temperatures. The results of the RF magnetron sputtering method show that AZOY films have the lowest resistivity about 2.6×10-2 Ω-cm at 70W and all AZOY films show high transmittance over 80 % at 400 nm ~ 800 nm visible. In addition, the reduced modulus of AZOY films increased with increasing sputtering power. Moreover, the crystal quality and mechanical properties of the AZOY films deposited on glass substrates is much better than on PET substrate because of less surface roughness.