Characterization of Ti-O-C Composite Films Prepared by Cathodic Arc Deposition Using CO2 as Reactive Gas

• Main Authors: Shih-Hsiung Chen, 陳世雄
• Other Authors: Cheng-Hsun Hsu
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/64367338048309948901

碩士 === 大同大學 === 材料工程學系(所) === 97 === In this study, the Ti-O-C composite coatings were synthesizes on AISI 304 stainless steel substrate by a cathodic arc deposition(CAD) system using CO2 reactive gas and Titanium (99%) target. Coating parameter were designed via the variation in the flow rate CO2 reactive gas to control the working pressure at three conditions of 3, 5, and 7 mtorr. Then the coating morphologies and properties such as roughness, chemical composition, structure, and adhesion were all analyzed. Moreover, polarization tests (in 3.5wt% NaCl), immersion tests (in 20 Vol%H2SO4), were tested, and wetting erosion tests were also performed for exploring the effects of working pressure on the coated AISI 304 stainless steel. For a comparison with these composite coatings, the monolithic coating of TiO and DLC were also respectively deposited with the same working pressure. The experiment results showed that for an optimized value of the working pressure, i.e. 5mtorr, the TiO/DLC composite coatings could be smoothly synthesized on AISI 304 substrate, and showed an improved properties, such as lower surface roughness (Ra：0.17 vs 0.21-0.23μm), higher adhesion strength (HF1 vs HF2), and hardness (18 vs 15-16 GPa) in comparison to the coatings deposition at other working pressure. Moreover, the optimum coatings achieved a remarkable improvement in the corrosion resistance, wear resistance, and erosion resistance of AISI 304 stainless steel.