Intelligent Constant Force Feedback Controller Design for Atomic Force Microscopes

• Main Authors: Jian-Jie Huang, 黃建偕
• Other Authors: Yuan-Jay Wang
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/14944971416743306773

碩士 === 東南科技大學 === 電機工程研究所 === 97 === This paper develops a constant force feedback mechanism based on fuzzy logic for a tapping mode Atomic Force Microscope. Then, a PID-like fuzzy controller is designed to overcome the shortcomings of a traditional PID controller in a tapping mode Atomic Force Microscope. By using the PID-like fuzzy controller, the cantilever tip can track the surface of the sample rapidly and accurately even though the topology of the surface is arbitrary and not given a priori. The rapid tracking response allows us to observe high aspect ratio micro structure accurately and quickly. The tip crash resulting from overshoot in commercial AFM with a traditional PID controller could be avoided. Additionally, continuous gain tuning in commercial AFMs to schedule the controller efforts is alleviated. In final, a computer simulation is provided to demonstrate the effectiveness and confirm validity of the proposed controller.