| Summary: | 碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 97 === This research aimed to develop precision polishing systems for improving the surface finish of long fine cylinder and diffractive optical element (DOE) based on the non-contact polishing process. Apart from design and development of the polishing systems, the related polishing parameters such as slurry concentration, abrasive size, polishing gap were correlated to the obtained surface roughness, form accuracy and material removal rate. The results showed that in the case of cylinder polishing-- the fifteen degree inner holes exhibited better surface roughness improve rate (SRIR) than that of vertical holes. As to the case of DOE polishing system, the UV-cured polishing molds demonstrated good SRIR of the V-grooves without giving in too much form accuracy.
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