| Summary: | 碩士 === 國立臺北科技大學 === 機電整合研究所 === 97 === Micro coordinate measurement machine (Micro CMM) is one of the most important processes to measure the profile and dimensional size of the tiny components. However, in the micro manufacturing field, micro-electro-discharge process is one of the most important technologies of micro-minimizing and ultra precise machining method.
By way of the experiment to demonstrate under the conditions of different summit current, under different electric current in opening time of single shot energy, it may form the different diameter immediately the mirror surface micro spherical stylus . When using summit current 3A and single pulse discharge in opening time 70μs, it may form the best mirror surface of micro spherical stylus in diameter 70 µm immediately. But in different discharges energy of the pulse wave width, the micro spherical stylus shape size differs from; when the pulse wave width reaches to 200μs, and electric current 5A, the ball probe''s shape is then unable to form, and experiment demonstrates that time micro spherical stylus shape approaches circle, it shows that best real roundness for pulse width 70~130 μs, and tiny axis diameter of 40 µm, the single pulse discharge forms the real micro spherical stylus roundness to be the best, its magnitude of error in 2 µm, which is unable to achieve by traditional processing .
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