Characterization of thin-film magnetic core for the CMOS-MEMS Planar Fluxgate

• Main Authors: Ting-Hong Chen, 陳亭宏
• Other Authors: 呂志誠
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/722msg

碩士 === 國立臺北科技大學 === 機電整合研究所 === 97 === In this thesis, the CMOS-MEMS planar fluxgates were designed and fabricated. The planar coils on the sensors were made by TSMC 0.35 μm process supported by CIC. The thin-film permalloy cores were made by RF sputtering and patterned by photolithography in the post process. The magnetic characteristics of the thin-film soft magnetic cores were characterized by measuring the m-H curves in order to find the optimal parameters of sputtering process. The result is helpful in manufacturing the micro-fluxgate magnetometer, which will be suitable for applications in non-destructive testing, metal detection, and electronic compass.