Application of genetic algorithm optimization on the physical parameters of the meteorological forecast deposition of thin film semiconductor manufacturing process

碩士 === 南台科技大學 === 資訊管理系 === 97 === TFT-LCD (Thin Film Transfer Liquid Crystal Display) is a complex process of high-tech industries, its manufacturing processes are highly dynamic process of degeneration or variability. There are many factors such as wear of machinery, materials consumption, and sea...

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Bibliographic Details
Main Authors: ChengHsienLi, 李政憲
Other Authors: 楊棠堯
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/20273463781622884917