The study of low temperature aluminum induced crystallization (AIC) poly-Si1-xGex and poly silicon thin film and its optic-electronic characteristics
碩士 === 南台科技大學 === 光電工程系 === 97 === In this thesis, poly-Si1-xGex films and poly-Si films, which are fabricated by aluminum-induced crystallization (AIC) process, are induced and crystallized with different parameters such as annealing time and thickness of Al thin films. We also discuss the effects...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57619089948452563518 |