| Summary: | 碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 97 === This paper aims to explore the gas-lubricating rail system, including the main contents of precision air-systems, rigid analysis and the best part of three combinations of the parameters. Flotation system in precision include institutions and sophisticated control systems, precision ceramic body using sophisticated slider design and guide precision, high precision and stability in the availability of precision, all-metal materials used another slider, and two slide design, Guide to two different surface roughness and ceramics Guide to do a total of three experimental analysis of the impact of its rigid value, is used Restrictor Restrictor their own productions. Control systems using PC-Base Control, precision ball screw lead, optical ruler with the servo motors, the design of the production of closed-loop control system. Precision load testing is used, the three-measuring device, laser confocal displacement meter and nano-level vibration analyzer to detect the rigid system. Re-use Taguchi gas pressure by adjusting the air bearing gap, the load parameters such as load, find the best parameter combination to improve the quality of system equipment.
Finally, in accordance with the experimental data confirmed the rail and the slider (air bearing surface) of the surface roughness on the overall impact of gas lubrication equipment really great is that the air bearings and the surface roughness caused by instability of the gas flow.
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