Using Data Mining Techniques in Development of MURA Prediction Module for Large Area Photo Mask
碩士 === 僑光技術學院 === 工程科技研究所 === 97 === The coming up of larger glass substrates create the demand for larger photomasks. In order to remain competitive in such circumstances, companies have been strengthening their technological capabilities and creating higher quality assurance. The MURA phenomenon...
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88031760785123684448 |