The analytical and experimental studies of a circular multi-layered annular piezoelectric actuator
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 97 === Piezoelectric materials have been used in many Micro-Electro-Mechanical Systems (MEMS) for actuation, particularly in micropumps. Of several configurations used in micropumps, the circular disk is the most popular. In many cases, the unimorphs consisting of...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/hb8nj7 |