Investigation of Aluminum Doped Znic Oxide Films by Chemical Deposition

• Main Authors: Yu-Ting Hsu, 徐鈺婷
• Other Authors: Wen-How Lan
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/92093432540675594028

碩士 === 國立高雄大學 === 電機工程學系碩士班 === 97 === In this thesis, we deposit the aluminum doped zinc oxide (AZO) thin film on glass substrates by sol–gel spin coating method and spray pyrolysis method. The surface morphologies, compositions, electrical and optical transmittance of the films were studied. The different composition variance of the films by the two methods can be found. With followed heat treatment under mixed argon/ hydrogen ambient, the film quality shows some different behaviors. As the temperature reach to 600℃, the AZO films prepared by sol-gel method were suffuse many cavities and less zinc quantity can be observed. On the contrary, the film prepared by spray pyrolysis method shows a better behavior at high temperature.