Finite Element Method Analysis of Natural Frequency of Single-Crystal Quartz

• Main Authors: Bo-Shiun Huang, 黃柏勳
• Other Authors: 張家歐
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/07518270871309657100

碩士 === 國立臺灣大學 === 應用力學研究所 === 97 === This thesis mainly simulates the natural frequency of the (YXl)-88° single-crystal quartz accelerometers by Finite Element Method; by simulating the resonant frequency of the beam, tuning fork and double-ended tuning fork, along with adjustments made in parameters of the length, width and thickness of the beam, the width of the gap, and the size and shape of the proof mass. The thesis aims at understanding the influence of these adjustments on the resonant frequency of single-crystal quartz accelerometers, and further, at finding the important parameters that would affect it, so as to derive the best design of the single-crystal quartz accelerometers. And finally, the piezoelectric effect caused by the electrode and electric field is induced, in order to calculate the natural frequency of the single-crystal quartz accelerometers. From this thesis, we are able to know the changes of natural frequency in accordance with different geometric parameters, the sizes of special natural frequency, and that as the width of beams differs, the influence of natural frequency differs as well.