Development of Magnetism-assisted Micro-Imprinting Process for Replication of Nano/Micro-Structures

• Main Authors: Yung-Jin Weng, 翁永進
• Other Authors: 楊申語
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/86095087077073228218

博士 === 國立臺灣大學 === 機械工程學研究所 === 97 === Micro-nano structural components are the key components to be applied in future instrumentation for digital optoelectronics, telecommunications, flat panel displays, and bio-medicine. The conventional micro-component production technology requires a rigid mold of complicated manufacturing processes, expensive precision equipment, high temperature, and high pressure cooling processes. Therefore, the process has disadvantages, such as time-consuming, costly, and limited in visualization and controllability. This study aimed to develop a micro-nano structural imprinting processing technology of low temperature, low pressure, and rapid prototyping magnetic soft mold. It first integrated the micro-electro-mechanical process, laser processing/gas micro-thermo imprinting micro-structural manufacturing process, Anodic Aluminum Oxide (AAO) method, and nano oxidation technology to produce micro-nano structural patterns. Then, it employed PDMS composite magnetic materials to create a micro-nano structural magnetic soft mold of appropriate structural strength and flexibility by casting mold, and then prepared polymer materials. In the initial stage, it discussed the imprint forming of micro structural reproduction, using gas-assisted powder imprinting micro-forming technology. Then, it employed self-developed magnetic-assisted imprinting processing technology (including electromagnetic controllable imprinting process and electromagnetic UV imprinting process) to discuss the production and detection of magnetic-assisted imprinting processes for micro-nano structural components. Finally, it developed a magnetic roller imprinting process equipment, and successfully produced magnetic rollers, while analyzing and exploring key manufacturing technologies. The main research contents included discussion on micro-nano structural mold processing technology and its applications, analysis and exploration on gas-assisted powder imprinting micro-forming technology, discussion on magnetic-assisted micro-nano structural imprinting process, discussion on micro-nano component detection analysis and development of related processing procedures, and discussion and development of magnetic-assisted roller micro imprinting processing equipment. This study successfully established the integrated technological platform of micro-electro-mechanical processing procedures, laser processing/gas micro-thermo imprinting of micro structure processing procedures, AAO method, nanooxidation processing procedures to prepare micro-nano structural molds supplemented with PDMS composite magnetic material casting imprinting film, and micro nano magnetic soft mold imprinting reproduction, according to magnetic-assisted imprinting processing procedure/magnetic roller imprinting processing procedure. This method is innovative and creative in terms of processing procedures, and has advantages of simple, fast, inexpensive, and available for mass production, as well as providing a better alternative in the reproduction of micro structural components, contributing to the upgrading of the science, and technological industry of micro nano systems.