Lithography Friendly Multilevel Analytical Placement
碩士 === 國立臺灣大學 === 電子工程學研究所 === 97 === Due to the sub-wavelength lithography, manufacturing requires intensive use of Resolution-Enhancement Techniques (RETs), among which Optical Proximity Cor- rection (OPC) is the most popular technique in industry, to improve printability. Moreover, physical desig...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82062896411092594825 |