Identification of Zernike-Polynomial Systematic Pattern with Spatial Variation Spectrum
碩士 === 國立臺灣大學 === 工業工程學研究所 === 97 === Zernike polynomials are commonly used to characterize and model systematic patterns of observed circular-shaped topography, such as wafer topography in semiconductor fabrication and corneal aberration in biomedical engineering. However, the infinite number of Ze...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76970147627301487925 |