Fabrication of Micro Holes Array by Precision Filled Wax Metal Deposition

• Main Authors: Tsu-Sheng Luo, 羅智昇
• Other Authors: Shun-Tong Chen
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/5r7txz

碩士 === 國立臺灣師範大學 === 機電科技研究所 === 97 === The major purpose of the study presents a novel fabrication approach for machining micro holes array—“Precision Filled Wax Electroforming”. A set of micro holes array with 170 µm diameter is fabricated using micro processes that including micro EDM hole-drilling, filling sacrificial material, precision electroforming and stripping. First of all, the substrate that is made of mirror SUS304 is EDM drilling, then, the softened wax in the guide tube is extruded through the micro holes on the substrate. The wax is formed with micro precision cylindrical shape. The wax is as the electroforming mole and deposited a layer of metal. Finally, the structure with micro holes array is obtained after the wax is melted and cleaned inside the work part by hot water. Experimental data show that the wax mold has excellent acid-resisting, heat-resisting and perfect stripping. The average hole diameter of the finished micro holes array is 0.17mm as well as ideal form accuracy. The proposed approach can significantly contribute to the precision machining industry.