A study on Flexible Structure Design of Ultra-precision Positioning Platform

• Main Authors: Gong Da Fan, 范功達
• Other Authors: Ming Zheng Tu
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/bq993k

碩士 === 國立臺灣師範大學 === 機電科技研究所 === 97 === Abstract In general, positioning platform with three degrees of freedom utilizes four piezoelectric pieces to achieve its motion control. The reduction of the number of piezoelectric pieces will decrease the costs dramatically. This study aims at the design and analysis of flexible structure of positioning platform with lesser number of piezoelectric pieces to give the rotation capability. In this study, the level principle is used to design a rotating mechanism in positioning platform. The deformation of flexible structure caused by piezoelectric pieces due to applied voltage gives rotating motion. The stress and deformation of positioning platform for different designs are analyzed by method of finite element, then Taguchi method is used to choose the optimal size of platform to achieve the desired displacement accuracy. The results of design study are applied to implement a rotating positioning platform used in optics field. The performance is examined by two ways: 1.For a given voltage, the deformation of piezoelectric block is sensed and its signals are transmitted back to get the displacement. 2. McKesson interference system to measure the displacement The test results coincide with the simulation data within acceptable range. . Keywords：Precision positioning platform, Flexible structure, Taguchui method, Finite element method.