The study of thermal outgassing on ultra high vacuum system with venting extremely dry nitrogen
碩士 === 國立清華大學 === 生醫工程與環境科學系 === 97 === Thermal outgassing rates of aluminum and titanium chambers, which were vented to dry nitrogen atmospheres with different conditions, were measured. The vacuum surface states were compared with different venting conditions in order to obtain lower outgassing ra...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45969494262779582367 |