Study of Amorphous InGaZnO Thin Film Electrical Characteristics for Nonvolatile Memory Applications
碩士 === 國立清華大學 === 工程與系統科學系 === 97 === Amorphous oxide semiconductors (AOSs) are attracted much attention due to low temperature deposition, flexible, transmission, and uniformity. It has been investigated of AOSs, such as ITO, IZO, TiO2, ZnO, In2O3, Ga2O3, IGO, a-IGZO, etc. Especially, the thin film...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10752358234973447620 |