Synthesis and characterization of amorphous and crystalline Zr-Cu-Ag-Al metallic films deposited by unbalanced magnetron sputtering

Synthesis and characterization of amorphous and crystalline Zr-Cu-Ag-Al metallic films deposited by unbalanced magnetron sputtering

碩士 === 國立清華大學 === 工程與系統科學系 === 97 ===

Bibliographic Details
Main Authors: Tsai,Chia-Cheng, 蔡佳成
Other Authors: Yu,Ge-Ping
Format: Others
Language:en_US
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/10519065803184823174
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spelling ndltd-TW-097NTHU55930062015-10-13T13:11:50Z http://ndltd.ncl.edu.tw/handle/10519065803184823174 Synthesis and characterization of amorphous and crystalline Zr-Cu-Ag-Al metallic films deposited by unbalanced magnetron sputtering 利用磁控濺鍍法備製鋯-銅-銀-鋁合金薄膜之製程及性質研究 Tsai,Chia-Cheng 蔡佳成 碩士 國立清華大學 工程與系統科學系 97 Yu,Ge-Ping Huang,Jia-Hong 喻冀平 黃嘉宏 2008 學位論文 ; thesis 77 en_US
collection NDLTD
language en_US
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 工程與系統科學系 === 97 ===
author2 Yu,Ge-Ping
author_facet Yu,Ge-Ping
Tsai,Chia-Cheng
蔡佳成
author Tsai,Chia-Cheng
蔡佳成
spellingShingle Tsai,Chia-Cheng
蔡佳成
Synthesis and characterization of amorphous and crystalline Zr-Cu-Ag-Al metallic films deposited by unbalanced magnetron sputtering
author_sort Tsai,Chia-Cheng
title Synthesis and characterization of amorphous and crystalline Zr-Cu-Ag-Al metallic films deposited by unbalanced magnetron sputtering
title_short Synthesis and characterization of amorphous and crystalline Zr-Cu-Ag-Al metallic films deposited by unbalanced magnetron sputtering
title_full Synthesis and characterization of amorphous and crystalline Zr-Cu-Ag-Al metallic films deposited by unbalanced magnetron sputtering
title_fullStr Synthesis and characterization of amorphous and crystalline Zr-Cu-Ag-Al metallic films deposited by unbalanced magnetron sputtering
title_full_unstemmed Synthesis and characterization of amorphous and crystalline Zr-Cu-Ag-Al metallic films deposited by unbalanced magnetron sputtering
title_sort synthesis and characterization of amorphous and crystalline zr-cu-ag-al metallic films deposited by unbalanced magnetron sputtering
publishDate 2008
url http://ndltd.ncl.edu.tw/handle/10519065803184823174
work_keys_str_mv AT tsaichiacheng synthesisandcharacterizationofamorphousandcrystallinezrcuagalmetallicfilmsdepositedbyunbalancedmagnetronsputtering
AT càijiāchéng synthesisandcharacterizationofamorphousandcrystallinezrcuagalmetallicfilmsdepositedbyunbalancedmagnetronsputtering
AT tsaichiacheng lìyòngcíkòngjiàndùfǎbèizhìgàotóngyínlǚhéjīnbáomózhīzhìchéngjíxìngzhìyánjiū
AT càijiāchéng lìyòngcíkòngjiàndùfǎbèizhìgàotóngyínlǚhéjīnbáomózhīzhìchéngjíxìngzhìyánjiū
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