Post-annealing Induced Phase Transformation and Phase Separation of Zr(O,N) Thin Films

Post-annealing Induced Phase Transformation and Phase Separation of Zr(O,N) Thin Films

碩士 === 國立清華大學 === 工程與系統科學系 === 97 ===

Bibliographic Details
Main Authors: Wang,Sheng-Chen, 王聖禎
Other Authors: Yu,Ge-Ping
Format: Others
Language:en_US
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/90681147320314788549
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spelling ndltd-TW-097NTHU55930052015-10-13T13:11:50Z http://ndltd.ncl.edu.tw/handle/90681147320314788549 Post-annealing Induced Phase Transformation and Phase Separation of Zr(O,N) Thin Films 熱處理對鍍著氮氧化鋯薄膜產生相變化及相分離之研究 Wang,Sheng-Chen 王聖禎 碩士 國立清華大學 工程與系統科學系 97 Yu,Ge-Ping Huang,Jia-Hong 喻冀平 黃嘉宏 2008 學位論文 ; thesis 80 en_US
collection NDLTD
language en_US
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 工程與系統科學系 === 97 ===
author2 Yu,Ge-Ping
author_facet Yu,Ge-Ping
Wang,Sheng-Chen
王聖禎
author Wang,Sheng-Chen
王聖禎
spellingShingle Wang,Sheng-Chen
王聖禎
Post-annealing Induced Phase Transformation and Phase Separation of Zr(O,N) Thin Films
author_sort Wang,Sheng-Chen
title Post-annealing Induced Phase Transformation and Phase Separation of Zr(O,N) Thin Films
title_short Post-annealing Induced Phase Transformation and Phase Separation of Zr(O,N) Thin Films
title_full Post-annealing Induced Phase Transformation and Phase Separation of Zr(O,N) Thin Films
title_fullStr Post-annealing Induced Phase Transformation and Phase Separation of Zr(O,N) Thin Films
title_full_unstemmed Post-annealing Induced Phase Transformation and Phase Separation of Zr(O,N) Thin Films
title_sort post-annealing induced phase transformation and phase separation of zr(o,n) thin films
publishDate 2008
url http://ndltd.ncl.edu.tw/handle/90681147320314788549
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