A study of electromagnetic force-assisted Micro- and nano-imprinting technology
博士 === 國立清華大學 === 動力機械工程學系 === 97 === In recent years, microstructure devices and micro-systems have been widely used in various applications such as information processing, optical communication, optoelectronics, flat panel display and bio-technology. With the paramount concern of cost in many new...
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| Format: | Others |
| Language: | zh-TW |
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2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60438494779605127919 |