Development of Low-driving-voltage Capacitive MEMS Microphone

碩士 === 國立中山大學 === 電機工程學系研究所 === 97 === To achieve the miniaturization and high performance of the mobile phone, notebook, hearing aid and personal digital assistant (PDA), many researchers focus on the developing a new-type microphone with very small dimension, high quality and low manufacturing cos...

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Bibliographic Details
Main Authors: Tsung-wei Lin, 林宗瑋
Other Authors: I-Yu Huang
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/db97g5