A Novel Packaging for MEMS-Based Pressure Sensors
博士 === 國立中山大學 === 光電工程學系研究所 === 97 === This dissertation proposes a novel packaging methodology for micro-electro-mechanical systems (MEMS) based pressure sensors by using a patterned ultra-thick (150
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/2mm386 |