Design and Fabrication of micro mirrors, and their reflectivity analysis

• Main Authors: Chiang,Sung-Hung, 江松弘
• Other Authors: Chiang, Ting-Lung
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/31271948598015302277

碩士 === 國立屏東科技大學 === 機械工程系所 === 97 === This paper focuses on the design and manufacture of a micro-mirror, by means of Surface Micromachining, and the use of MENS to manufacture optical components of micro-mirror. The paper employs 8, 10, and 12 cantilever beams, which are gold-plated to act as the mirror’s reflective components. The curved mirror structure is created by overlapping two different materials of different expansion coefficients, which camber due to the residual stresses. The paper comprises both simulation and experimental analysis. The simulation employs of APILUX . APILUX is a design software package for the analysis of optics, which is used to simulate the cambering of the cantilever. Red laser and green laser were applied to mirror surface, where optic energy was lost due to reflection. Similarly, experimental measurements were made by applying the two lasers to the mirror surface, and using a optic energy apparatus to measure the loss of optic. This research method was developed in-house. The micro-mirror described may be used for any application that requires a reflective component.