A Study of Zinc Titanate Thin Films Deposited by RF Magnetron Sputtering
碩士 === 國立屏東科技大學 === 材料工程所 === 97 === ZnTiO3 have excellent microwave dielectric properties, can be as high frequency (> 10 GHz) capacitors among the passive components industry. In this study, zinc titanate thin films was successfully deposited on SiO2/Si wafer by RF magnetron sputtering.The Rate...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36956452065390743270 |