| Summary: | 碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 97 === This study investigated the influence of deposition processes and electrode structures on the thin film properties of Sol-Gel derived lead zirconate titanate (PZT). The feasibility of using lanthanum strontium manganese oxide (LSMO) as electrodes is analyzed. Annealing conditions during repeated sol-gel depositions and the following annealing conditions of PZT thin films are two major issues in this study. Introduction of a LSMO buffer layer between PZT thin film and metal electrodes will improve PZT crystallization and ferroelectricity. To simplify the material structure, this study attempts the application of LSMO as oxide electrodes. The resistivity of produced LSMO thin film is 5.17×10-4 Ω•m at the minimum thickness of 700 nm. The remanent polarization for PZT using LSMO/Pt/Ti as lower electrodes is 27.1 μC/cm2, and the coercive electric field is 124.2 kV/cm. The remanent polarization is 25.9 μC/cm2, and the coercive electric field is 150 kV/cm while using LSMO as lower electrodes directly. LSMO electrodes significant improve the fatigue resistance of PZT. After 106 cycles in the fatigue test, the residual polarization of PZT using LSMO/Pt/Ti as lower electrodes decreased 59%. On the other hand, no significant decrease is observed for the material structure using LSMO as lower electrodes. A parameter study of polarization conditions for different lower electrodes is presented. In general, the polarization process enhances the capacitance of PZT about 13.7% ~ 24.6 %. To assess the overall performance of the PZT films from various processing conditions, a single-axial piezoelectric accelerometer is proposed and fabricated. The designed resonant frequency is 40 kHz, and the frequency can be used in the following 7999 Hz, simulate the sensitivity of the component sensitivity is about 20.5 μV/g. Thin films from different processing and annealing conditions are introduced to the fabrication of micro-accelerometer to evaluate the influence of process conditions and electrode materials on the piezoelectricity of sol-gel derived PZT thin films.
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