| Summary: | 碩士 === 國立高雄第一科技大學 === 光電工程研究所 === 97 === In this study, using simulation and assistance design solar selective absober formula programming by MATLAB to determine film structure is SiO2/Ti/SiO2 (multilayer absorber) to deposit on the Si substrate. According to this initial condition, carries on various films parameter simulation. It may obtain the optimization of film thickness condition (df1=83nm, df2=9.5nm, df3=102nm).And using the multi-target magnetic enhanced sputter system to fabricate solar selective absorber. We use formula of fitting thickness to confirm thickness of the samples we made. By way of UV/VIS spectroscope measure reflection spectrum, and compute thickness and absorptance（α）of samples. Best absorptance of solar selective absorber in this study may achieve 0.942.
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