The Study on Fabrication of Aspherical microlens by Thermal Reflow
碩士 === 國立東華大學 === 材料科學與工程學系 === 97 === In this thesis, silver nano-particles were added into the photoresist to increase the influence of gravity on the thermal reflow of microlenses. The purpose of this thesis is to fabricate aspherical microlenses. In this study, the properties of photoresist mixe...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19349702650009325993 |
| Summary: | 碩士 === 國立東華大學 === 材料科學與工程學系 === 97 === In this thesis, silver nano-particles were added into the photoresist to increase the influence of gravity on the thermal reflow of microlenses. The purpose of this thesis is to fabricate aspherical microlenses.
In this study, the properties of photoresist mixed with/without silver nanoparticles were measured and analyzed. The influences of many process parameters, including thermal-reflow temperature and method, and concentration of silver nanoparticles, on the surface morphology of microlenses were also investigated.
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