Numerical Simulation of Air Knife Chamber for LCD Glass Subtrate
碩士 === 國立彰化師範大學 === 機電工程學系 === 97 === In the TFT-LCD process, the cleaning process possesses a large proportion to the yield rate on account of the exterior cleanliness of the substrate will affect the result of coating or the coating thickness and thickness uniformity. The topic of this research is...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/93998476128769271178 |