| Summary: | 碩士 === 國立彰化師範大學 === 機電工程學系 === 97 === In the TFT-LCD process, the cleaning process possesses a large proportion to the yield rate on account of the exterior cleanliness of the substrate will affect the result of coating or the coating thickness and thickness uniformity. The topic of this research is the air-knife module, the following portion of the wet cleaner to glass substrate. Applying the numerical simulation based on the object of the original scheme, with the accomplishment of the design, exploits computational clinical software to build numerical model entities and discusses the glass substrates under different internal flow fields in the air knife module in order to identify any need for design alteration.
Enabling to predict the dynamic direction of the internal fluid in the system is far considerable towards the air knife of glass substrate layout. The air knife module of the glass substrate is mainly composed of two units air knifes, and removes the thin water film to dry on the plate surface. Synchronously, several air inlets and outlets are on the top and down position in this air-dry structure to keep the fluent inner flow field, sweep the particles smoothly in order to maintain the cleanness of the glass substrate after drying.
By the simulation analysis before manufacturing the 7.5 generation equipment and the numerical simulated experience of the air knife chamber, the numerical results demonstrates the reference to the machine production and the basis to adjust and trial. These sequential parameters will offer to retrench the cost of developing large-sized dryer, repeated trial and reduplicative error on time and man power in order to elevate the competitiveness of domestic industries.
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