| Summary: | 碩士 === 國立彰化師範大學 === 機電工程學系 === 97 === In this thesis, a new flexible hinge (FH) positioning stage has been designed to cooperate with PZT actuator for ultra-fine position application. In order to improve the dynamic characterization of the stage system in positioning , we consider the leaf type spring and notch type spring to design a new flexible hinge stage.
Firstly, we apply the Castigliano theorem and Lagrange’s equation of structures and obtain the dynamic characterization of the stage. Further, Taguchi Orthogonal Array Table (L9) is used to design the experiments that performed by ANSYS finite element software. Analysis of Variance (ANOVA) and additive model comfirmed the optimal parameters of the FH stage from Taguchi method. Compared with theory, the percent error is about 14%.
To perform the impact testing experiment, the hammer is used to impact X, Y and Z-axis of the FH stage respectively. Accelerometer is used to acquire the vibration signals and then get the Frequency Response Function (FRF) of the structure. Then the natural frequency and mode shapes of the FH stage by curve-fitting software ME’scope is investigated. Compared with FEA result in free-free modal analysis, the percent error of the first six natural frquency is smaller than 3%.
Finally, the new FH stage has been proposed to establish precision positioning stage which can achieve better dynamic characterization. This result might be a contribution to the precision manufacturing of the Micro-Electro-Mechanical System (MEMS) industry.
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