Design and Research on Micro Mirror Scanning System

• Main Author: 葉耀隆
• Other Authors: 沈志雄
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/81611775760850490682

碩士 === 國立彰化師範大學 === 機電工程學系 === 97 === Abstract In recent years, the actuator of micro mirror of electrostatic actuation is one of the main products for the industrial application and mass production in the MEMS field. This device is requested to project light source accurately onto the high reflection mirror surface, with lower power consumption, wide operating frequency range and the mean failure life (MFT) is long enough and so on. On these demands, the lower power consumption feature is to save energy and reduce the heat which is produced from the electrical energy. It also has to reduce the thermal stress of structure and increase service life of the product. We use the micro scanning mirror of MEMS in this research. The circuit base on electrostatic principle has been designed to boost the voltage for the reflector that can drive the MEMS component to reach the resonance frequency. Thus, it can change the surface angle of the mirror. Moreover, it could produce the gray scale by adding an addition modulate light source of the laser. The application of micro electro-optical technology is highly integrated. We could understand more detail on the driving characteristic of the MEMS component as well as the electro-optical element and its control system. The XILINX’s IC chip has been used in the control system. The VHDL program had written for control the CPLD digital circuit so that it can produce the gray effect for the laser light and to drive the scanning mirror. Eventually, all modules are combined on a PCB board and some useful characteristics have been measured for the laser projector application. Keyword：MEMS,Micro Scanning Mirror,Boost Voltage, Electrostatic,Resonance Frequency,Laser.