| Summary: | 碩士 === 國立中央大學 === 光電科學研究所 === 97 === In this thesis, we proposed a polarize phase shifting interferometer based on Twyman-Green interferometer structure which is used to measure the thin film optical admittance, and the refractive index and thickness of single layer thin film can be derived directly; moreover, the refractive index and thickness of multilayer thin film can be solved by numerical fitting method.
In our arrangement, the low coherence light source is composed of a halogen lamp, which is a polychromatic light source and covering the visible spectral range, and a choosable narrow band pass filter, which is used to create a Gaussian power spectral density source, and achromatic phase shifter are need to this multi-wavelength measurement.
As a polarization interferometer, a novel pixelated mask with a micro-polarizer phase shifting array are placed just prior to the CCD, so that we can use single interferogram to extract phase information and that’s effective in reducing environmental vibration.
The measurement results were compared with the results obtained by ellipsometer. The results meet reasonable values in both refractive index and thickness.
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