The machining characteristic of poly-silicon by WEDM
碩士 === 國立中央大學 === 機械工程研究所 === 97 === Electrical discharge machining (EDM) has been developed for over half a century, and there have been numerous materials machined by means of this technology. However, little research is conducted on poly-silicon. The current study investigated the effects of oper...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51629001715703922195 |