Safety Management of Change – Case Study of Exhaust Retrofit at ECP Process System in Semiconductor Fab
碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災組 === 97 === Any engineering changes from chemical, pipe, parts of equipment or layout of manufacturing process might generate unexpected hazards of safety, hygiene & environment. The major purpose of this thesis is looking for the importances of applying Safety...
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| Format: | Others |
| Language: | zh-TW |
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2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73889145510584621926 |
| Summary: | 碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災組 === 97 === Any engineering changes from chemical, pipe, parts of equipment or layout of manufacturing process might generate unexpected hazards of safety, hygiene & environment. The major purpose of this thesis is looking for the importances of applying Safety Management of Change (SMOC) in safety management in semiconductor fab using exhaust retrofit at ECP process system as an example. It is shown that not only enforcing SMOC assessment before changing is needed but also risk assessment should be involved to avoid gas leakage accident which occurred when risk assessment on characteristics of equipment changings was not properly conducted. Insufficient prevention action caused residual hydrogen leak and activation of gas detectors which triggered evacuating broadcasting. As a result, manufacturing process was interrupted.
This research has demonstrated the importance of risk control of safety management of change. Systematic safety management which combines the traditional single point SMOC and risk assessment has been developed. The difference between the work procedure of the traditional SMOC and systematic safety management of change was compared and the benefit of using the systematic approach was calculated. The methods to improvement the SMOC procedure are summaried as：1. Enforce the SMOC rules. 2. Establish fully review mechanism of SMOC. 3. Classify SMOC rules. 4. Employ SMOC procedure on-line. The conclusions of this study are useful for the releavant industry.
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