Effect of compressive stress on the nickel sheet induced lateral crystallization of amorphous silicon thin film.
碩士 === 國立交通大學 === 材料科學與工程系所 === 97 === The purpose of this study is to develop a low-cost fabrication method of metal induced lateral crystallization of amorphous silicon film, which can replace the expensive coating equipment. After executed compressive stress at the stresses ranging from 265.8MPa...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/17619348453614015459 |