Influence of Ambient Atmosphere on Thermal-Annealing Amorphous IGZO TFTs
碩士 === 國立交通大學 === 光電工程系所 === 97 === The stability of as-deposited a-IGZO TFTs was studied. The serious turn-on voltage shift under seven times sequent IDVG measurement of unstable as-deposited device was observed. It suggests that the atomic bonding of film was loose due to low temperature during sp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07758196694325457718 |