Constructing a Feedback and Control System Between Production Tool and Metrology in Automation Manufacturing

• Main Author: 高志明
• Other Authors: 唐麗英
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/12579411981136304026

碩士 === 國立交通大學 === 管理學院碩士在職專班工業工程與管理組 === 97 === Building a system to effectivelyl maintain the quality in the process flow is the main purpose a manufacturing factory. When a product was produced as planned by the manufacturing flow, insert some measurement stations in the manufacturing flow to make sure the quality of the product will be kept in the good level and well controlled. Products usually contain many engineering variations in the process flow. Mostly of the variations came from the production equipments in the work station, e.g., the shift or offset of the controllers for gas flow, pressure, temperature, etc. The quality system needs to pay more cost of manpower to correct the shift or variation of the equipment. Thus, the purpose of this study is tried to design a quality control system in automation manufacturing. This system collect the response (measurements) and parameters setting valves in the equipment. The expected setting value in the equipment could be found in this system and replace the previous setting value in the equipment. This feedback system was implemented in a 8” wafer fabrication plant in Hsinchu Taiwan and is verified to be effective. Key words: DOE, feedback control, quality monitor and control