Design and Development of an Automated Visual Inspection System for Die Surface Defects

碩士 === 國立交通大學 === 工業工程與管理系所 === 97 === Product quality is an important factor in semiconductor manufacturing. Therefore, die defect inspection is an important quality control process before packaging. Conventionally, the inspection of die surface defects by human observation is labor intensive. It r...

Full description

Bibliographic Details
Main Authors: Chang, Yuan-Shuo, 張元碩
Other Authors: Perng, Der-Baau
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/73552165301373767638
id ndltd-TW-097NCTU5031062
record_format oai_dc
spelling ndltd-TW-097NCTU50310622015-10-13T15:42:32Z http://ndltd.ncl.edu.tw/handle/73552165301373767638 Design and Development of an Automated Visual Inspection System for Die Surface Defects 晶粒表面缺陷自動視覺檢測系統之設計與開發 Chang, Yuan-Shuo 張元碩 碩士 國立交通大學 工業工程與管理系所 97 Product quality is an important factor in semiconductor manufacturing. Therefore, die defect inspection is an important quality control process before packaging. Conventionally, the inspection of die surface defects by human observation is labor intensive. It results in low efficiency and inaccuracy. This research is to design and develop an automated visual inspection system for die surface defects by using the machine vision technology. The mainly focused inspection items of dice are particles, contaminations, pad missing, pad damage, discoloration, and passivation. A prototype of the automated visual inspection system for die surface defect inspection will be implemented for inspection efficiency, cost down, and full-inspection. Perng, Der-Baau 彭德保 2009 學位論文 ; thesis 51 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 工業工程與管理系所 === 97 === Product quality is an important factor in semiconductor manufacturing. Therefore, die defect inspection is an important quality control process before packaging. Conventionally, the inspection of die surface defects by human observation is labor intensive. It results in low efficiency and inaccuracy. This research is to design and develop an automated visual inspection system for die surface defects by using the machine vision technology. The mainly focused inspection items of dice are particles, contaminations, pad missing, pad damage, discoloration, and passivation. A prototype of the automated visual inspection system for die surface defect inspection will be implemented for inspection efficiency, cost down, and full-inspection.
author2 Perng, Der-Baau
author_facet Perng, Der-Baau
Chang, Yuan-Shuo
張元碩
author Chang, Yuan-Shuo
張元碩
spellingShingle Chang, Yuan-Shuo
張元碩
Design and Development of an Automated Visual Inspection System for Die Surface Defects
author_sort Chang, Yuan-Shuo
title Design and Development of an Automated Visual Inspection System for Die Surface Defects
title_short Design and Development of an Automated Visual Inspection System for Die Surface Defects
title_full Design and Development of an Automated Visual Inspection System for Die Surface Defects
title_fullStr Design and Development of an Automated Visual Inspection System for Die Surface Defects
title_full_unstemmed Design and Development of an Automated Visual Inspection System for Die Surface Defects
title_sort design and development of an automated visual inspection system for die surface defects
publishDate 2009
url http://ndltd.ncl.edu.tw/handle/73552165301373767638
work_keys_str_mv AT changyuanshuo designanddevelopmentofanautomatedvisualinspectionsystemfordiesurfacedefects
AT zhāngyuánshuò designanddevelopmentofanautomatedvisualinspectionsystemfordiesurfacedefects
AT changyuanshuo jīnglìbiǎomiànquēxiànzìdòngshìjuéjiǎncèxìtǒngzhīshèjìyǔkāifā
AT zhāngyuánshuò jīnglìbiǎomiànquēxiànzìdòngshìjuéjiǎncèxìtǒngzhīshèjìyǔkāifā
_version_ 1717767631245672448