The Research of Lateral Growth of ZnO Nanowires with CVD for Gas Sensing
碩士 === 國立成功大學 === 奈米科技暨微系統工程研究所 === 97 === This research uses plane substrates as the one to grow ZnO nanowires and changes different process parameter -such as ratio of O2:Ar、growth temperature、substrate distance etc.- with CVD process to grow ZnO nanowires . Also, the analyses of SEM、TEM、XRD and...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/35299047626387081902 |